Background and Professional Activities
Education
Ph.D. 1994 Rochester Institute of Technology, Dissertation: “Excimer Laser Microlithography at 193nm”
M.S. 1988 Rochester Institute of Technology, Thesis: “Optically Transparent IR Films of ZnS – Metal – ZnS”
Professional Associations
Fellow, SPIE International Society for Optical Engineering
Fellow, Optical Society of America (OSA)
Fellow, Institute of Electrical and Electronics Engineers (IEEE)
Member, American Vacuum Society (AVS)
Member, American Society for Engineering Education (ASEE)
External Service
2014-2018 SPIE Microlithography Symposium Co-Chairman
2012-2014 OSA Awards Committee
1997-2014 SPIE Optical Microlithography, Program Committee
2010-2014 EIPBN Program Committee
2003-2014 SPIE Zernike Award Committee
2009-2010 Councilor, Optical Society of America (OSA), Rochester Section
2008-2009 Program Chairman, International Symposium on Immersion Lithography
2004-2005 Conference Chairman, SPIE Optical Microlithography Conference
1997-2002 EIPBN Program Committee
1997-1998 SPIE/ISMA Singapore Program Committee
1995-1997 Chairman, OSA Lithography / Patterning Technical Working Group
1990-1996 Faculty Advisor, SPIE Student Chapter
Editorial review of IEEE, JVAC, JM3, SPIE, and Applied Optics journals
Honors and Awards
2017 AVS Excellence in Leadership Award
2014 IEEE Technology Innovation Award
2013 RIT Innovation Hall of Fame
2012 Fellow, Optical Society of America
2011 SPIE Research Mentor Award
2008 Visiting Professor, IMEC Micro and Nanoelectronics Research Center
2007 Trustees Excellence in Scholarship and Teaching Award
2007 Fellow, SPIE International Society for Optical Engineering
2007 Rush Henrietta Outstanding Alumni Award
2005 Million Dollar Principle Investigator Award, Rochester Institute of Technology
2005 Patenting Productivity Award, Rochester Institute of Technology
2002 Intellectual Property Productivity Award, Rochester Institute of Technology
2001 Visiting Professor, IMEC Micro and Nanoelectronics Research Center
2000 Intel Professor of Research and Technology, Intel Corp.
1999 RIT Creators Award, Rochester Institute of Technology
1997 Visiting Scholar, International Sematech
1993 Texas Instruments, Douglas Harvey Award
1991 Texas Instruments, Douglas Harvey Award